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Chinese Optics Letters, Volume. 7, Issue 8, 08694(2009)

Theoretical modelling and experimental study of novel photothermal microactuators

Lihong Ma1,2, Dongxian Zhang1, Chao Liu1, and Haijun Zhang1
Author Affiliations
  • 1State Key Laboratory of Modern Optical Instrumentation, Zhejiang University, Hangzhou 310027, China
  • 2Information Optical Institute, Zhejiang Normal University, Jinhua 321004, China
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    References(12)

    [1] [1] A. Selvakumar and K. Najafi, J. Microelectromech. Syst. 12, 440 (2003).

    [2] [2] J.-C. Shen, W.-Y. Jywe, H.-K. Chiang, and Y.-L. Shu, Prec. Eng. 32, 71 (2008).

    [3] [3] N. Kawashima, K. Takeda, and K. Yabe, Chin. Opt. Lett. 5, S109 (2007).

    [4] [4] Y.-W. Park and D.-Y. Kim, J. Magn. Magn. Mater. 272-276, e1765 (2004).

    [5] [5] S. Fu, G. Ding, H. Wang, Z. Yang, and J. Feng, Microelectron. Journal 38, 556 (2007).

    [6] [6] Q.-A. Huang and N. K. S. Lee, J. Micromech. Microeng. 9, 64 (1999).

    [7] [7] Z. Han, C. Zhou, and E. Dai, Chin. Opt. Lett. 6, 619 (2008).

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    [9] [9] A. D. Oliver, S. R. Vigil, and Y. B. Gianchandani, IEEE Trans. Electron Devices 50, 1156 (2003).

    [10] [10] F. R. Szabo and P. E. Kladitis, in Proceedings of the 2004 International Conference on MEMS NANO and Smart Systems 446 (2004).

    [11] [11] D. Zhang, H. Zhang, C. Liu, and J. Jiang, Microsc. Res. Techn. 71, 119 (2008).

    [12] [12] N. D. Mankame and G. K. Ananthasuresh, J. Micromech. Microeng. 11, 452 (2001).

    Cited By

    [1] Bo Wang, Bin Shi, Fu Ting Yi, Dong Xian Zhang, Hai Jun Zhang, Tian Chong Zhang, Jing Liu, Li Na Ma. Photothermal Microactuators Fabricated by LIGA Technology. Key Engineering Materials, 562-565, 534(2013).

    [2] E. Davies, D. S. George, A. S. Holmes. Remote Photothermal Actuation for Calibration of In-Phase and Quadrature Readout in a Mechanically Amplified Fabry–Pérot Accelerometer. IEEE Photonics Journal, 6, 1(2014).

    [3] B. Shi, H. J. Zhang, B. Wang, F. T. Yi, J. Z. Jiang, D. X. Zhang. Dynamic properties of a metal photo-thermal micro-actuator. Applied Optics, 54, 1369(2015).

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    Lihong Ma, Dongxian Zhang, Chao Liu, Haijun Zhang. Theoretical modelling and experimental study of novel photothermal microactuators[J]. Chinese Optics Letters, 2009, 7(8): 08694

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    Paper Information

    Received: Nov. 11, 2008

    Accepted: --

    Published Online: Aug. 17, 2009

    The Author Email:

    DOI:10.3788/COL20090708.0694

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology