Chinese Optics Letters, Volume. 7, Issue 8, 08694(2009)

Theoretical modelling and experimental study of novel photothermal microactuators

Lihong Ma1,2, Dongxian Zhang1, Chao Liu1, and Haijun Zhang1
Author Affiliations
  • 1State Key Laboratory of Modern Optical Instrumentation, Zhejiang University, Hangzhou 310027, China
  • 2Information Optical Institute, Zhejiang Normal University, Jinhua 321004, China
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    We present a category of novel photothermal (PT) microactuators. Each microactuator consists of two PT arms that are jointed at the free end and connected to an anchor at the fixed end. When a laser beam irradiates one of the arms (called hot arm, and the other is cold arm), light energy is absorbed and converted into heat. The asymmetric thermal expansion of the hot and cold arms results in lateral deflection. Based on conduction heat transfer theory and heat dissipation mechanism, we study the PT effects and establish the theoretical model of PT expansion for the microactuators. The temperature distribution and the linear thermal expansion can be numerically calculated. The analytical solution provides an insight into the operation of the actuators and predicts the performance of the actuators with new designs. A symmetry microactuator and a microswitch as the prototypes have been fabricated and tested. The experimental results are in good agreement with the theoretical predictions and prove the feasibility of the novel PT microactuators.

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    Lihong Ma, Dongxian Zhang, Chao Liu, Haijun Zhang. Theoretical modelling and experimental study of novel photothermal microactuators[J]. Chinese Optics Letters, 2009, 7(8): 08694

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    Paper Information

    Received: Nov. 11, 2008

    Accepted: --

    Published Online: Aug. 17, 2009

    The Author Email:

    DOI:10.3788/COL20090708.0694

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