Chip, Volume. 3, Issue 4, 100113(2024)
III-nitride MQW-based optoelectronic sensors for multifunctional environmental monitoring
This work presents an integrated multi-quantum well (MQW) optoelectronic sensor leveraging III-nitride materials for multifunctionality on a monolithic chip. The sensor was fabricated using standard microfabrication techniques and adopted the identical InGaN/GaN MQWs, which enables simultaneous emission and detection. The sensor is featured with a double concentric circle structure which supports both on-chip and off-chip detection mechanisms, being capable of detecting environmental parameters like rotational speed, proximity, and sucrose concentration. It exhibits stable photocurrent response to rotational speed up to 8000 rpm, a 3 cm vertical detection range, and a linear response with 3.9 nA/% sensitivity to changes in sucrose concentration, which demonstrates the potential for diverse applications in industrial and biomedical fields.
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Xumin Gao, Dongmei Wu, Tianlong Xie, Jialei Yuan, Mingyuan Xie, Yongjin Wang, Haitao Zhao, Gangyi Zhu, Zheng Shi. III-nitride MQW-based optoelectronic sensors for multifunctional environmental monitoring[J]. Chip, 2024, 3(4): 100113
Category: Research Articles
Received: Aug. 9, 2024
Accepted: Oct. 8, 2024
Published Online: Jan. 23, 2025
The Author Email: Shi Zheng (shizheng@njupt.edu.cn)