Acta Photonica Sinica, Volume. 32, Issue 10, 1208(2003)

An Astigmatic Method for Real-time Nanometer Vibration Measurement

[in Chinese]1,2, [in Chinese]1,2, [in Chinese]1,2, and [in Chinese]1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    References(5)

    [1] [1] Chen J, Ishii Y, Murata K. Heterodyne interferometry with a frequence-modulated laser diode.Appl Opt,1988,27(1):124~128

    [2] [2] Wang X Z,Sasaki O,Suzuki T,et al. Measurement of spatially nonuniform phase changes of a self-pumped phase-conjugate mirror.Opt Eng,1999,38(9):1553~1559

    [3] [3] Wang X Z, Sasaki O, Suzuki T,et al. Measurement of small vibration amplitudes of a rough surface by an interferometer with a self-pumped phase-conjugate mirror.Appl Opt,2000,39(25):4593~4597

    [4] [4] Wang X F,Wang W, Qian F,et al.Laser diode interferometer used to measure displacements within large range with a few namometer accuracy.Opt & Laser Tech,2001,33(4): 219~223

    [5] [5] Yan Y,Chen F,Hu X,et al.J of Tianjin University,2001,34(5):615~618

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    [2] Zong Yonghong, Zhou Changhe, Ma Jianyong, Wang Jin, Lu Yancong. Optimized Design of Leveling and Focusing Servo Control System[J]. Acta Optica Sinica, 2017, 37(1): 122001

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. An Astigmatic Method for Real-time Nanometer Vibration Measurement[J]. Acta Photonica Sinica, 2003, 32(10): 1208

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    Paper Information

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    Received: Oct. 16, 2002

    Accepted: --

    Published Online: Sep. 17, 2007

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