Acta Photonica Sinica, Volume. 48, Issue 12, 1216001(2019)

Effect of Different Oxygen Content of Tantalum Oxide on Electrochromic Properties of Tungsten Oxide

Hui-dong YANG1,1,2,2, Jin-hui XIA1,1、*, Si-ran PENG1,1, Jing-yan ZHANG1,1, Fei-xiong BAO1,1, and Ya-qing LIU1,1
Author Affiliations
  • 1School of Information Science and Technology, Jinan University, Guangzhou 510632, China
  • 2Jinan University Shaoguan Research Institute, Shaoguan, Guangdong 512027, China
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    Figures & Tables(11)
    电致变色器件的封装示意图Package diagram of electrochromic device
    不同氧含量的TaOx的XRD图XRD patterns of TaOx with different oxygen content
    氧化钨及不同氧含量下氧化钽的SEM图SEM images of tungsten oxide and tantalum oxide with different oxygen content
    薄膜的全谱透射图谱Full spectrum transmission spectrum of thin films
    薄膜的光谱响应测试Spectral response test diagram of the thin film
    薄膜的电流沉积Electrodeposition of thin films
    薄膜的着色效率Diagram of coloring efficiency of films
    器件的光谱动力学测试图谱Spectrodynamics test of the device
    不同电压下器件的着色效率及电荷容量图谱Coloring efficiency and charge-capacity maps of devices at different voltages
    • Table 1. The preparation process parameters of the film

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      Table 1. The preparation process parameters of the film

      TargetPower sourceWorking pressure/PaOxygen concentrationSupptering power/WFilm thickness/nm
      WDirect current2.030%150350
      NiDirect current2.06%150350
      TaDirect current1.010%~40%148350
    • Table 2. Element ratio of TaO x with different oxygen doping contents

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      Table 2. Element ratio of TaO x with different oxygen doping contents

      Oxygen content10%12.5%15%20%40%
      Ta29.74%28.30%26.35%26.12%25.18%
      O60.89%62.04%64.05%63.99%62.19%
      Ta:O1:2.041:2.191:2.431:2.451:2.48
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    Hui-dong YANG, Jin-hui XIA, Si-ran PENG, Jing-yan ZHANG, Fei-xiong BAO, Ya-qing LIU. Effect of Different Oxygen Content of Tantalum Oxide on Electrochromic Properties of Tungsten Oxide[J]. Acta Photonica Sinica, 2019, 48(12): 1216001

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    Paper Information

    Received: Jun. 12, 2019

    Accepted: Sep. 29, 2019

    Published Online: Mar. 17, 2020

    The Author Email: XIA Jin-hui (13535093327@163.com)

    DOI:10.3788/gzxb20194812.1216001

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