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Journal of Inorganic Materials, Volume. 34, Issue 8, 867(2019)

Material Removal Mechanism of Monocrystalline Germanium Based on Nano-scratch Experiment

Rui-Wen GENG1... Xiao-Jing YANG1,*, Qi-Ming XIE2, Rui LI3 and Liang LUO1 |Show fewer author(s)
Author Affiliations
  • 1Faculty of Mechanical and Electrical Engineering, Kunming University of Science and Technology, Kunming 650500, China
  • 2Kunming Institute of Physics, Kunming 650233, China
  • 3Faculty of Environmental Science and Engineering, Kunming University of Science and Technology, Kunming 650500, China
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    AbstractGet PDF(in Chinese)
    Figures&Tables (11)
    Equations (11)
    References (14)
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    Figures & Tables(11)
    Diagram of nano-scratch experiment
    1. Diagram of nano-scratch experiment

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    Scratch morphology and its local amplification
    2. Scratch morphology and its local amplification

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    Curves of scratch distance vs depth for monocrystalline germanium
    3. Curves of scratch distance vs depth for monocrystalline germanium

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    AFM images of const load scratch
    4. AFM images of const load scratch

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    Diagram of crack distribution for monocrystalline germanium
    5. Diagram of crack distribution for monocrystalline germanium

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    Curves of scratch force vs distance
    6. Curves of scratch force vs distance

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    Curves of scratch force vs depth for monocrystalline germanium
    7. Curves of scratch force vs depth for monocrystalline germanium

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    Curve of elastic recovery rate during scratching
    8. Curve of elastic recovery rate during scratching

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    Indenter-workpiece contract model in scratch process
    9. Indenter-workpiece contract model in scratch process

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    • Table 1. Nano-scratch test parameters

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      Table 1. Nano-scratch test parameters

      Test parametersValue
      Scratch crystal plane(100)
      Scratch distance/μm500
      Scratch speed/(μm•s-1)5
      Load rate/(mN•μm-1)0.25
      Normal load range/mN0-125
      Const normal load/mN20/35/50

    • Table 2. Load and scratch distance ranges for diffirent regimes

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      Table 2. Load and scratch distance ranges for diffirent regimes

      RegimeLoad range/mNScratch distancerange/μm
      Ductile regime0-48100-298
      DBT regime48-100298-500
      Brittle regime100-125500-600
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    Rui-Wen GENG, Xiao-Jing YANG, Qi-Ming XIE, Rui LI, Liang LUO. Material Removal Mechanism of Monocrystalline Germanium Based on Nano-scratch Experiment[J]. Journal of Inorganic Materials, 2019, 34(8): 867

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    Paper Information

    Category: RESEARCH PAPER

    Received: Oct. 18, 2018

    Accepted: --

    Published Online: Sep. 26, 2021

    The Author Email: YANG Xiao-Jing (xjyang@vip.sina.com)

    DOI:10.15541/jim20180500

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology