Fig. 1. (a) Schematic diagram and (b) micrograph of the proposed gas pressure sensor based on paralleled FPIs

Fig. 1. Relationship between resonate wavelength and gas pressure

Fig. 2. (a) Simulated reflection spectra of the sensing and reference FPIs, respectively; (b) The reflection spectra of the single sensing FPI at different gas pressures

Fig. 3. Calculated reflection spectra of the paralleled FPIs for gas pressure variation of 200 kPa

Fig. 4. Experimental setup for gas-pressure sensing

Fig. 5. (a) Measured reflection spectrum of the sensing and reference FPIs, respectively; (b) The reflection spectrum of the device with paralleled FPIs

Fig. 6. Response of the sensing FPI to gas pressure. (a) The reflection spectra at different pressures; (b) The relationship between resonances dip wavelength and gas pressure

Fig. 7. Response of the proposed device with paralleled FPIs to gas pressure. (a) Reflection spectra at different gas pressure; (b) Relationship between resonances dip wavelength and gas pressure

Fig. 8. (a) Envelopes of the reflection spectra of the device with paralleled FPIs at different gas pressures; (b) The relationship between resonances dip wavelength of the envelope and gas pressure

Fig. 9. Temperature response of the proposed device with paralleled FPIs. (a) Measured reflection spectra at different temperatures; (b) The relationship between resonances dip wavelength and temperature