Parallel fabrication of silicon concave microlens array by femtosecond laser irradiation and mixed acid etching

An Pan; Tao Chen; Cunxia Li; Xun Hou

doi:10.3788/COL201614.052201

Chinese Optics Letters, Volume. 14, Issue 5, 052201(2016)

Parallel fabrication of silicon concave microlens array by femtosecond laser irradiation and mixed acid etching

An Pan¹, Tao Chen^1、*, Cunxia Li², and Xun Hou¹

¹Key Laboratory for Physical Electronics and Devices of the Ministry of Education, Shaanxi Key Lab of Information Photonic Technique, School of Electronics & Information Engineering, Xi’an Jiaotong University, Xi’an 710049, China

²Xi’an University of Technology, Department of Applied Physics, Xi’an 710049, China

show less

Cited By

Article index updated: Mar. 8, 2024

Citation counts are provided from Web of Science. The counts may vary by service, and are reliant on the availability of their data.

The article is cited by 13 article(s) from Web of Science.

The article is cited by 4 article(s) CLP online library. (Some content might be in Chinese.)

Tools

Get Citation

Copy Citation Text

An Pan, Tao Chen, Cunxia Li, Xun Hou. Parallel fabrication of silicon concave microlens array by femtosecond laser irradiation and mixed acid etching[J]. Chinese Optics Letters, 2016, 14(5): 052201

Download Citation

EndNote(RIS)BibTex Plain Text

Set citation alerts for article

Save article for my favorites

Paper Information

Category: Optical Design and Fabrication

Received: Jan. 4, 2016

Accepted: Mar. 4, 2016

Published Online: Aug. 6, 2018

The Author Email: Tao Chen (tchen@mail.xjtu.edu.cn)

DOI:10.3788/COL201614.052201

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology