Acta Optica Sinica, Volume. 19, Issue 10, 1368(1999)
Influence of Characteristics of an AOM on the Measurement Accuracy of a Heterodyne Interferometer
The characteristics of an acousto-optical modulator (AOM) with cross-talks among its diffracted beam are proposed and verified theoretically and experimentally. The cross-talks cause intensity modulation items and the frequencies are harmonics of the driving frequency in each diffracted beam. The drift of the incident beam on an AOM will cause a frequency drift in its diffracted beams. The influences on the measuring accuracy of an AOM heterodyne interferometer are analyzed in detail. Methods to eliuminate the influences are proposed and identified: employing two AOMs and obtaining its reference signal from the interferometer. The AOM heterodyne interferometer can be used in the case of the accuracy beyond nanometer.
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[in Chinese], [in Chinese], [in Chinese]. Influence of Characteristics of an AOM on the Measurement Accuracy of a Heterodyne Interferometer[J]. Acta Optica Sinica, 1999, 19(10): 1368