Optics and Precision Engineering, Volume. 30, Issue 20, 2467(2022)

Accuracy improvement method and optimal design of straightness in five-degree-of-freedom measurement of long guide

Cong ZHANG... Wenzheng LIU, Fajie DUAN*, Xiao FU and Xinxing WANG |Show fewer author(s)
Author Affiliations
  • State Key Laboratory of Precision Measuring Technology & Instruments, Tianjin University, Tianjin300072, China
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    Figures & Tables(22)
    Transceiver split laser five-degree of freedom measurement structure
    Optical path of straightness measurement unit
    Installation diagram of beam angle drift measurement optical path
    Optical path of telescopic objective
    Schematic diagram of beam angle drift measurement
    Schematic diagram of angular crosstalk error
    QD measurement model based on Gaussian beam
    Relationship of the spot position and its relative position on QD (x-direction)
    Straightness calibration system at fixed distance
    Schematic diagram of calibration interval division under long distance
    Schematic diagram of QD measurement zero offset under long distance
    Schematic diagram of QD measurement zero offset correction
    Measurement device of five-degree of freedom
    Calibration experiment at fixed distance
    Calibration results at fixed distances
    Calibration effect test results
    QD measurement zero deviation correction experiment
    Simulation experiment of angular crosstalk error
    Test results of angle crosstalk error compensation
    Straightness measurement stability test results
    • Table 1. Polynomial coefficients obtained from calibration at fixed distance

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      Table 1. Polynomial coefficients obtained from calibration at fixed distance

      节点/m多项式系数
      A4A3A2A1
      1-90.94412.4042.221227.18
      2166.29467.4413.481224.43
      3-49.24423.0255.571239.39
      4-7.69375.2442.291260.45
      5-43.58437.3934.511278.86
    • Table 2. Zero offset correction value of QD measurement

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      Table 2. Zero offset correction value of QD measurement

      节点/m常数项A0
      10.00
      20.43
      3-1.53
      4-1.99
      50.00
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    Cong ZHANG, Wenzheng LIU, Fajie DUAN, Xiao FU, Xinxing WANG. Accuracy improvement method and optimal design of straightness in five-degree-of-freedom measurement of long guide[J]. Optics and Precision Engineering, 2022, 30(20): 2467

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    Paper Information

    Category: Micro/Nano Technology and Fine Mechanics

    Received: Feb. 28, 2022

    Accepted: --

    Published Online: Oct. 27, 2022

    The Author Email: DUAN Fajie (fjduan@tju.edu.cn)

    DOI:10.37188/OPE.20223020.2467

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