Optics and Precision Engineering, Volume. 30, Issue 20, 2467(2022)
Accuracy improvement method and optimal design of straightness in five-degree-of-freedom measurement of long guide
Fig. 1. Transceiver split laser five-degree of freedom measurement structure
Fig. 3. Installation diagram of beam angle drift measurement optical path
Fig. 8. Relationship of the spot position and its relative position on QD (
Fig. 10. Schematic diagram of calibration interval division under long distance
Fig. 11. Schematic diagram of QD measurement zero offset under long distance
Fig. 12. Schematic diagram of QD measurement zero offset correction
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Cong ZHANG, Wenzheng LIU, Fajie DUAN, Xiao FU, Xinxing WANG. Accuracy improvement method and optimal design of straightness in five-degree-of-freedom measurement of long guide[J]. Optics and Precision Engineering, 2022, 30(20): 2467
Category: Micro/Nano Technology and Fine Mechanics
Received: Feb. 28, 2022
Accepted: --
Published Online: Oct. 27, 2022
The Author Email: DUAN Fajie (fjduan@tju.edu.cn)