Acta Optica Sinica, Volume. 37, Issue 10, 1012006(2017)
Design and Control of Ultra-Precision Fine Positioning Stage for Scanning Beam Interference Lithography
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Sen Lu, Kaiming Yang, Yu Zhu, Leijie Wang, Ming Zhang, Jin Yang. Design and Control of Ultra-Precision Fine Positioning Stage for Scanning Beam Interference Lithography[J]. Acta Optica Sinica, 2017, 37(10): 1012006
Category: Instrumentation, Measurement and Metrology
Received: Apr. 5, 2017
Accepted: --
Published Online: Sep. 7, 2018
The Author Email: Yang Kaiming (yangkm@tsinghua.edu.cn)