Journals Articles Conferences News About CLP
Submit a paper Email Alert
Search
Search
Articles
Journals
News
Advanced Search
Top Searches
2D MaterialsTransformation opticsQuantum PhotonicsSmall lasersSemiconductor UV PhotonicsSupersymmetric microring laser arrays

Semiconductor Optoelectronics, Volume. 45, Issue 2, 247(2024)

Fabrication and Performance of Flat MIM Capacitors with Ta/Ta2O5/Cu Structure

LIANG Taohua1...2, YONG Huan3, JI Jingxin3, YANG Shiqing2,3 and WANG Yan3 |Show fewer author(s)
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
    • show less
    AbstractGet PDF(in Chinese)
    Figures&Tables (0)
    Equations (0)
    References (15)
    Tools
    Paper Information
    Topics
    Figures & Tables(0)
    Tools

    Get Citation

    Copy Citation Text

    LIANG Taohua, YONG Huan, JI Jingxin, YANG Shiqing, WANG Yan. Fabrication and Performance of Flat MIM Capacitors with Ta/Ta2O5/Cu Structure[J]. Semiconductor Optoelectronics, 2024, 45(2): 247

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Set citation alerts for article
    Save article for my favorites
    Paper Information

    Category:

    Received: Nov. 13, 2023

    Accepted: --

    Published Online: Aug. 14, 2024

    The Author Email:

    DOI:10.16818/j.issn1001-5868.2023111304

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology