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Optics and Precision Engineering, Volume. 22, Issue 8, 2047(2014)

Design and performance testing of 200-element silicon unimorph deformable mirror

MA Jian-qiang1,*... LIU Ying2, CHEN Jun-jie2, LI Bao-qing2 and CHU Jia-ru2 |Show fewer author(s)
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    MA Jian-qiang, LIU Ying, CHEN Jun-jie, LI Bao-qing, CHU Jia-ru. Design and performance testing of 200-element silicon unimorph deformable mirror[J]. Optics and Precision Engineering, 2014, 22(8): 2047

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    Received: Nov. 18, 2013

    Accepted: --

    Published Online: Sep. 15, 2014

    The Author Email: Jian-qiang MA (majianqiang@nbu.edu.cn)

    DOI:10.3788/ope.20142208.2047

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology