Fig. 1. Schematic diagram of indium bump deposition process

Fig. 2. SEM morphology of indium bump at different substrate temperature. (a),(d) SEM morphology of indium bump at T₀ K; (b),(e) SEM morphology of indium bump at T₀-30 K; (c),(f) SEM morphology of indium bump at T₀-45 K

Fig. 3. Statistical distribution of indium bump height at different substrate temperature. (a) Plot of indium bump height distribution; (b) Box-whisker plot of indium bump height distribution

Fig. 4. Statistical distribution of indium bump diameter at different substrate temperature. (a) Plot of indium bump diameter distribution; (b) Box-whisker plot of indium bump diameter distribution

Fig. 5. (a) Trend of indium layer roughness; (b) Trend of the ratio between vertical and horizontal indium growth rate ,and indium bump growth rate aspect ratio

Fig. 6. SEM morphology of indium bump at different deposition rate. (a),(d) SEM morphology of indium bump at V_V0+2 Å/s; (b),(e) SEM morphology of indium bump at V_V0+15 Å/s; (c),(f) SEM morphology of indium bump at V_V0+23 Å/s

Fig. 7. Statistical distribution of indium bump height at different deposition rate. (a) Plot of indium bump height distribution; (b) Box-whisker plot of indium bump height distribution

Fig. 8. Statistical distribution of indium bump diameter at different deposition rate. (a) Plot of indium bump diameter distribution; (b) Box-whisker plot of indium bump diameter distribution

Fig. 9. (a) Trend of indium layer roughness; (b) Trend of the ratio between vertical and horizontal indium growth rate, and horizontal indium growth rate