Fig. 1. Metasurface-based color display on a fabricated 12-inch Si wafer^［38］. Adapted with permission from Ref.［38］© The Optical Society

Fig. 2. Metasurface-based polarizing bandpass filter on a fabricated 12-inch Si wafer^［39］. Adapted with permission from Ref.［39］© The Optical Society

Fig. 3. Metasurface-based half-wave plate on a fabricated 12-inch Si wafer^［40］. Adapted from Ref.［40］，© 2019 Zhengji Xu et al.，published by De Gruyter. Under the Creative Commons Attribution 4.0 Public License

Fig. 4. Metalens fabricated on a 4-inch Si wafer^［41］. Adapted with permission from Ref.［41］© The Optical Society

Fig. 5. Metalens fabricated on a 12-inch Si wafer^［42］. © 2019 IEEE. Reprinted with permission from Ref.［42］

Fig. 6. Plasmonic perfect absorber fabricated on an 8-inch Si wafer^［44］. Adapted from Ref.［44］. Under the Creative Commons Attribution 4.0 Public License

Fig. 7. Reflective^［45］ and transmissive^［46］ metalenses fabricated on quartz wafers. Adapted with permission from Refs.［45-46］© The Optical Society

Fig. 8. Transmissive metalenses fabricated in all quartz glass wafers. Adapted with permission from Ref.［47］© 2019 American Chemical Society

Fig. 9. Metalenses directly fabricated on a 12-inch glass wafer^［48-49］. Adapted from Refs.［48-49］

Fig. 10. Metalens fabricated on a 12-inch glass wafer by layer transfer technology^［50］. Adapted from Ref.［50］，© 2020 Ting Hu et al.，published by De Gruyter. Under the Creative Commons Attribution 4.0 Public License

Fig. 11. Metasurface deflector fabricated on a 12-inch glass wafer by layer transfer technology^［51］. Adapted from Ref.［51］，© 2020 Nanxi Li et al.，published by De Gruyter. Under the Creative Commons Attribution 4.0 Public License