Optics and Precision Engineering, Volume. 10, Issue 5, 471(2002)
Research on the mechanism of a series bending arms piezoelectric micromotor
References(1)
[7] [7] Suzuki Y, Tani K, Sakuhara T.Development of a new type piezoelectric micromotor[J]. Sensors and Actuators,2000,83:244-248.
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[in Chinese], [in Chinese], [in Chinese]. Research on the mechanism of a series bending arms piezoelectric micromotor[J]. Optics and Precision Engineering, 2002, 10(5): 471
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