Optics and Precision Engineering, Volume. 20, Issue 10, 2200(2012)

Gas sensor array based on ceramic micro-hotplate for flammable gas detection

XUE Yan-bing1,2、* and TANG Zhen-an2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    References(14)

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    [2] [2] IVANOV P, LLOBET E, VERGARA A, et al.. Towards a micro-system for monitoring ethylene in warehouses [J]. Sensors and Actuators B, 2005,111-112: 63-70.

    [3] [3] SZECOWKA P M, SZCZUREK A, LICZNERSKI B W. On reliability of neural network sensitivity analysis applied for sensor array optimization [J]. Sensors and Actuators B: Chemical, 2011, 157: 298-303.

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    [7] [7] PISARKIEWICZ T, SUTOR A, POTEMPA P, et al.. Micro sensor based on low temperature cofired ceramics and gas-sensitive thin film [J]. Thin Solid films, 2003(436): 84-89.

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    [9] [9] VASILIEV A A, PAVELKO R G, GOGISH S Y, et al.. Alumina MEMS platform for impulse semiconductor and IR optic gas sensors[J]. Sensors and Actuators B, 2008, 132: 216-223.

    [10] [10] VASILIEV A A, GOGISH S Y. The optimization of high-temperature sensor microhotplates based on thin alumina membranes [J]. Eurosensors XVII, 2003: 344-347.

    [11] [11] XUE Y B, TANG ZH A. The design and thermal property study of suspended hotplate based on ceramic substrate [J]. Journal of Optoelectronics·Laser, 2009,20(6): 725-729. (in Chinese)

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    XUE Yan-bing, TANG Zhen-an. Gas sensor array based on ceramic micro-hotplate for flammable gas detection[J]. Optics and Precision Engineering, 2012, 20(10): 2200

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    Paper Information

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    Received: May. 23, 2012

    Accepted: --

    Published Online: Nov. 1, 2012

    The Author Email: Yan-bing XUE (dlxyb@djtu.edu.cn)

    DOI:10.3788/ope.20122010.2200

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