Optics and Precision Engineering, Volume. 20, Issue 12, 2686(2012)

Kinematical properties and optimal design of 3-DOF precision positioning stage

HU Jun-feng1、* and ZHANG Xian-min2
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    HU Jun-feng, ZHANG Xian-min. Kinematical properties and optimal design of 3-DOF precision positioning stage[J]. Optics and Precision Engineering, 2012, 20(12): 2686

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    Paper Information

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    Received: Oct. 5, 2012

    Accepted: --

    Published Online: Jan. 7, 2013

    The Author Email: Jun-feng HU (hjfsuper@126.com)

    DOI:10.3788/ope.20122012.2686

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