Optics and Precision Engineering, Volume. 16, Issue 3, 484(2008)
Calculation and simulation of silicon MEMS gyroscope with dual-mass resonant output
[4] [4] TREY A W R.Integrated MEMS tuning fork oscillators for sensor applications[D].Berkeley:University of California,1998.
[7] [7] ASHWIN A S.Integrated micromechanical resonant for inertial measurement systems[D].Berkeley:University of California,2002.
[9] [9] WANG Y Y,FAN S C,REN J,et al..A silicon microelectromechanical resonant gyroscope[C].Proceedings of the Sixth Intl.Symp.on Instrumentation and Control Technology:Sensors,Automatic Measurement,Control,and Computer Simulation.Beijing,P.R.China:SPIE,2006:63581F-1-63581F-6.
[10] [10] LI J L,FANG J C,YU W B.Silicon micromechanical tuning output gyroscope applied at navigation of micro unmanned aerial vehicle[C].AIAA Guidance Navigation and Control Conference and Exhibit.San Francisco:AIAA,2005.
[11] [11] ARMSTRONG B,AMIN B.PID control in the presence of static friction:A compensation of algebraic and describing function analysis[J].Automatica,1996,32(5):679-692.
[13] [13] MACLACHAN N.Theory and application of mathieu functions[M].Oxford:Oxford University Press,1974.
[14] [14] ALBRECHT T,GRUTTER P,HORNE D,et al..Frequency modulation detection using high-Q cantilevers for enhanced force microscope sensitivity[J].Journal of Applied Physics,1991,69(2):668-673.
Get Citation
Copy Citation Text
[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Calculation and simulation of silicon MEMS gyroscope with dual-mass resonant output[J]. Optics and Precision Engineering, 2008, 16(3): 484