Optics and Precision Engineering, Volume. 16, Issue 3, 484(2008)

Calculation and simulation of silicon MEMS gyroscope with dual-mass resonant output

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    References(7)

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Calculation and simulation of silicon MEMS gyroscope with dual-mass resonant output[J]. Optics and Precision Engineering, 2008, 16(3): 484

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    Paper Information

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    Received: Jul. 24, 2007

    Accepted: --

    Published Online: Jul. 8, 2008

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