Optics and Precision Engineering, Volume. 16, Issue 3, 484(2008)
Calculation and simulation of silicon MEMS gyroscope with dual-mass resonant output
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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Calculation and simulation of silicon MEMS gyroscope with dual-mass resonant output[J]. Optics and Precision Engineering, 2008, 16(3): 484
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