Optics and Precision Engineering, Volume. 16, Issue 7, 1253(2008)

Constant temperature thermal vacuum sensor based on micro-hotplate

ZHANG Feng-tian1...2,*, TANG Zhen-an2, YU Jun2 and WANG Jia-qi2 |Show fewer author(s)
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    ZHANG Feng-tian, TANG Zhen-an, YU Jun, WANG Jia-qi. Constant temperature thermal vacuum sensor based on micro-hotplate[J]. Optics and Precision Engineering, 2008, 16(7): 1253

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    Paper Information

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    Received: Nov. 7, 2007

    Accepted: --

    Published Online: Feb. 28, 2010

    The Author Email: Feng-tian ZHANG (zftstuart@sohu.com)

    DOI:

    CSTR:32186.14.

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