Optics and Precision Engineering, Volume. 16, Issue 7, 1253(2008)
Constant temperature thermal vacuum sensor based on micro-hotplate
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ZHANG Feng-tian, TANG Zhen-an, YU Jun, WANG Jia-qi. Constant temperature thermal vacuum sensor based on micro-hotplate[J]. Optics and Precision Engineering, 2008, 16(7): 1253
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Received: Nov. 7, 2007
Accepted: --
Published Online: Feb. 28, 2010
The Author Email: Feng-tian ZHANG (zftstuart@sohu.com)
CSTR:32186.14.