Optics and Precision Engineering, Volume. 16, Issue 7, 1253(2008)
Constant temperature thermal vacuum sensor based on micro-hotplate
To study the characteristics of Micro-hotplate(MHP)based vaccum sensor at constant temperature working mode,the influences of working temperature and dimensions on the working characteristics of MHP-based thermal vacuum sensor at constant temperature was analyzed based on the thermal analysis of MHP.An MHP-based thermal vacuum sensor was designed in the supporting beams of 65 μm long and 21 μm wide,and the gas gap below micro-hotplate of 0.5 μm.The micro sensor was fabricated successfully with surface micromachining technology.The testing results show that the fabricated vacuum sensor is sensitive in pressure range of 2~105 Pa and the sensor response characteristics are consistent with the theoretical calculated results.
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ZHANG Feng-tian, TANG Zhen-an, YU Jun, WANG Jia-qi. Constant temperature thermal vacuum sensor based on micro-hotplate[J]. Optics and Precision Engineering, 2008, 16(7): 1253
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Received: Nov. 7, 2007
Accepted: --
Published Online: Feb. 28, 2010
The Author Email: Feng-tian ZHANG (zftstuart@sohu.com)
CSTR:32186.14.