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Optoelectronics Letters, Volume. 17, Issue 11, 673(2021)

Study on thickness uniformity of Ta2O5 film evaporated on the inner-face of a hemispherical substrate

Lingmao XU... Yanchun HE, Kun LI, Hui ZHOU* and Yuqing XIONG |Show fewer author(s)
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  • Science and Technology on Vacuum Technology and Physics Laboratory, Lanzhou Institute of Physics, Lanzhou 730001, China
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    XU Lingmao, HE Yanchun, LI Kun, ZHOU Hui, XIONG Yuqing. Study on thickness uniformity of Ta2O5 film evaporated on the inner-face of a hemispherical substrate[J]. Optoelectronics Letters, 2021, 17(11): 673

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    Paper Information

    Received: Mar. 25, 2021

    Accepted: Jun. 6, 2021

    Published Online: Jan. 10, 2022

    The Author Email: Hui ZHOU (zhouhui510@sina.com)

    DOI:10.1007/s11801-021-1040-3

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology