Fig. 1. Schematic of perovskite solar cell scribing^[3]

Fig. 2. Schematic of excimer laser processing system

Fig. 3. SEM image of perovskite film. (a) Film face; (b) Side face

Fig. 4. Laser processing diagram

Fig. 5. 1-3 pulse WLIM 3D diagram. (a) Laser fluence 12 mJ/cm²; (b) Laser fluence 14 mJ/cm²; (c) Laser fluence 16 mJ/cm²; (d) Laser fluence 18 mJ/cm²

Fig. 6. 1-3 pulse WLIM deepth diagram laser fluence 18 mJ/cm²

Fig. 7. The relationship between machining depth and laser fluence in different pulse number

Fig. 8. SEM characterization of perovskite film after 5 pulse. (a) 40 mJ/cm²; (b) 60 mJ/cm²; (c) 80 mJ/cm²; (d) 100 mJ/cm²; (e) 120 mJ/cm²; (f) 140 mJ/cm²

Fig. 9. Energy spectrum diagram

Fig. 10. Atomic ratio after 5 pulses in different laser fluence (a) Pb; (b) I

Fig. 11. Machining depth comparison chart. (a) Excimer laser irradiation on film side; (b) Fs laser irradiation on film side; (c) Fs laser irradiation on base side

Fig. 12. Boundary SEM image Zone B is the processing area； zone P is the unprocessed area. (a) Excimer laser irradiation on film side; (b) Fs laser irradiation on film side; (c) Fs laser irradiation on base side