Fig. 1. Diagram of spheroid crystalline microcavity, fabricated crystalline microcavity, and section field distribution of fundamental mode of crystalline microcavity. (a) Schematic of spheroid crystalline microcavity; (b) fabricated crystalline microcavity; (c) section field distribution of fundamental mode of crystalline microcavity

Fig. 2. Schematic of integrated experimental setup for crystalline microcavity fabrication

Fig. 3. Flow chart of crystalline microcavity fabrication process and surface images obtained by high-powered microscope

Fig. 4. Surface roughness of crystalline microcavity obtained by test. (a) Surface roughness after rough cast; (b) surface roughness after fine cast

Fig. 5. Test system for crystalline microcavity waveguide coupling. (a) Diagram of test system; (b) diagram of waveguide coupling system; (c) experimental photograph of coupling system

Fig. 6. Resonant spectra excited after rough cast

Fig. 7. Resonant spectra excited after fine cast

Fig. 8. Statistical results of Q factor and FSR. (a) Statistical result of Q factor of resonant mode excited by rough cast; (b) statistical result of Q factor of resonant mode excited by fine cast; (c) statistical result of FSR of resonant mode after rough cast; (d) maximum Q factor after fine cast