Chinese Optics Letters, Volume. 22, Issue 3, 033602(2024)

Recent progress in thin-film lithium niobate photonic crystal [Invited] Editors' Pick

Rui Ge1, Jiangwei Wu1, Xiangmin Liu1, Yuping Chen1,2、*, and Xianfeng Chen1,3,4
Author Affiliations
  • 1State Key Laboratory of Advanced Optical Communication Systems and Networks, School of Physics and Astronomy, Shanghai Jiao Tong University, Shanghai 200240, China
  • 2School of Physics, Ningxia University, Yinchuan 750021, China
  • 3Shanghai Research Center for Quantum Sciences, Shanghai 201315, China
  • 4Collaborative Innovation Center of Light Manipulations and Applications, Shandong Normal University, Jinan 250358, China
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    Figures & Tables(15)
    Schematic of integrated LNPhC devices, including wavelength converter, sensor, modulator, opto-mechanical cavity, and superprism.
    Schematic of (a) TF-LNPhC on silica. Adapted with permission from [20]. (b) Suspended LNPhC. Adapted with permission from [22]. (c) APE LNPhC on common LN with lateral confinement. Adapted with permission from [15].
    Schematic of the LNPhC fabricated by EBL with Ar+ etching. (a) 2D LNPhC cavity. Adapted with permission from [28]. (b) LNPhC cavity with ultra-high Q-factor. Adapted with permission from [29]. (c) LNPhC modulator. Adapted with permission from [30].
    (a) Fabrication procedures of LNPhC based on the reactive ion etching and the IBEE technique. Adapted with permission from [10] and [25]. (b) Fabrication procedure of LNPhC based on redeposition-free FIB technique. Adapted with permission from [42]. (c) SEM image of holes fabricated by IBEE technique and redeposition-free FIB technique. Adapted with permission from [10] and [42].
    (a) Schematic and (b) SEM image of the etchless LNPhC with silica as the mask. Adapted with permission from [43]. (c) Schematic and (d) SEM image of the etchless LNPhC with polymer as the mask. Adapted with permission from [44].
    (a) Schematic of tapered fiber coupling. Adapted with permission from [28]. (b) End-face coupling. Adapted with permission from [15]. (c) Cross-polarized resonant scattering coupling. Adapted with permission from [38]. (d) Grating coupling. Adapted with permission from [34].
    (a), (b) Optical microscopy images of two different mode-gap cavities. (c) Spectrum of the second-harmonic signal of the mode-gap cavity. (d) Second-harmonic power as a function of the fundamental pump wave power of the mode-gap cavity. Adapted with permission from [28]. (e) Second-harmonic power as a function of the fundamental pump wave power of the L3 cavity. Adapted with permission from [38]. (f) Second-harmonic power as a function of the fundamental pump wave of the bulk cavity made by redeposition-free FIB. Adapted with permission from [42].
    (a) Schematic of the LNPhC waveguide used for generating spectrally unentangled biphoton states. Mode profiles of pump, signal, and idler modes at the (b) z = 0 and (c) y = 0 planes. (d) Band diagram of the pump mode. (e) Band diagram of the signal and idler modes. (f) Bloch harmonic distribution of the modes. Adapted with permission from [68].
    (a) SEM image, (b) experimental setup, and (c) results for Fano resonance-based LNPhC sensor. Adapted with permission from [75]. (d) Simulated transmission of the BIC LNPhC sensor. Adapted with permission from [80].
    (a) Structure and (b) SEM image and enlarged SEM image of the mode-gap LNPhC modulator. (c) Eye diagrams of the electro-optic switch. Adapted with permission from [30].
    (a) SEM image of suspended LNPhC nanobeam and (b) observed mechanical lasing. Adapted with permission from [31]. (c) SEM image of the LNPhC transducer. Adapted with permission from [33]. (d) Transmission spectrum and power spectral density change for the mechanical mode. Adapted with permission from [54].
    • Table 1. Q-Factors of the Recent Works Based on the TF-LNPhC Cavity

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      Table 1. Q-Factors of the Recent Works Based on the TF-LNPhC Cavity

      Ref.Cavity TypeQ-factorFabrication MethodYear
      [38]L3775 (Sim.), 535 (Exp.)IBEE2013
      [52]Mode-gap3.9 × 106 (Sim.)2015
      [21]Mode-gap330 (Sim.), 156 (Exp.)FIB2016
      [27]Mode-gap6 × 106 (Sim.), 1.09 × 105 (Exp.)EBL + Ar+ etching2017
      [53]Mode-gap5.43 × 104 (Exp.)EBL + Ar+ etching2018
      [28]Mode-gap1.5 × 106 (Sim.), 3.51 × 105 (Exp.)EBL + Ar+ etching2019
      [29]Mode-gap1.23 × 108 (Sim.), 1.41 × 106 (Exp.)EBL + Ar+ etching2019
      [31]Mode-gap4 × 106 (Sim.), 3.5 × 105 (Exp.)EBL + Ar+ etching2019
      [51]L4/3 with inverse design9.7 × 106 (Sim.)2020
      [54]Mode-gap6.29 × 104 (Exp.)EBL + Ar+ etching2020
      [30]Mode-gap1.34 × 105 (Exp.)EBL + Ar+ etching2020
      [32]Mode-gap1.7 × 104 (Exp.)EBL + Ar+ etching2020
      [33]Mode-gap4.7 × 105 (Exp.)EBL + Ar+ etching2020
      [42]Bulk75 (Exp.)Redeposition-free FIB2022
      [44]BIC12,010 (Exp.)Etchless LNPhC2022
      [34]Mode-gap1.58 × 105 (Exp.)EBL + Ar+ etching2023
    • Table 2. Performance Parameters of the Modulator Based on the TF-LNPhCa

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      Table 2. Performance Parameters of the Modulator Based on the TF-LNPhCa

      Ref.Modulator StructureVπ · L (V · cm)Vπ (V)L (mm)3 dB Bandwidth (GHz)Sim./Exp.Year
      [87]MZI0.66100Sim.2013
      [84]Slow light waveguide0.006311.80.00531Exp.2014
      [30]Nanobeam17.5Exp.2020
      [44]Etchless waveguide28Exp.2022
      [85]Nanobeam0.0874100.0874600Sim.2022
      [86]Nanobeam1.4280Sim.2023
    • Table 3. Optomechanic Properties of the LNPhC Nanobeam for Some State-of-the-Art Experimental Works

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      Table 3. Optomechanic Properties of the LNPhC Nanobeam for Some State-of-the-Art Experimental Works

      Ref.Q-factor (Optical)Q-factor (Mechanical)Coupling RateYear
      [27]1 × 105619271 kHz2017
      [31]3 × 10517,000120 kHz2019
      [54]6.3 × 104652020
      [32]1.7 × 104202020
    • Table 4. Comparison of Different Fabrication Processes of TF-LNPhC

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      Table 4. Comparison of Different Fabrication Processes of TF-LNPhC

      MethodSidewall Angle (°)Etching Technique of HolesFabrication Scale
      FIBNear 83Ga+ millingSmall scale
      EBL + Ar+ plasma etching55–85Ar+ millingWafer scale
      Redeposition-free FIBNear 90Ga+ millingSmall scale
      IBEE90HF wet etchingWafer scale
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    Rui Ge, Jiangwei Wu, Xiangmin Liu, Yuping Chen, Xianfeng Chen. Recent progress in thin-film lithium niobate photonic crystal [Invited][J]. Chinese Optics Letters, 2024, 22(3): 033602

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    Paper Information

    Category: Nanophotonics, Metamaterials, and Plasmonics

    Received: Sep. 14, 2023

    Accepted: Nov. 30, 2023

    Published Online: Feb. 20, 2024

    The Author Email: Yuping Chen (ypchen@sjtu.edu.cn)

    DOI:10.3788/COL202422.033602

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