Preparation of c-Axis Oriented AlN Film

Acta Optica Sinica, Volume. 22, Issue 8, 933(2002)

[in Chinese]^* and [in Chinese]

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[in Chinese], [in Chinese]. Preparation of c-Axis Oriented AlN Film[J]. Acta Optica Sinica, 2002, 22(8): 933

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Paper Information

Category: Thin Films

Received: Jun. 27, 2001

Accepted: --

Published Online: Aug. 8, 2006

The Author Email: (gonghuilaser@citiz.net)

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