Acta Optica Sinica, Volume. 2, Issue 3, 285(1982)

Optical properties of ion-implanted Si by CO2 intense-laser annealing

LI YUANHENG1 and LI YUANHENG2
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  • 2[in Chinese]
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    LI YUANHENG, LI YUANHENG. Optical properties of ion-implanted Si by CO2 intense-laser annealing[J]. Acta Optica Sinica, 1982, 2(3): 285

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    Paper Information

    Category: Rapid communications

    Received: May. 4, 1981

    Accepted: --

    Published Online: Sep. 15, 2011

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