[1] [1] KLAH H, CHAE J, YAZDI N, et al.. Noise analysis and characterization of a sigma-delta capacitive microaccelerometer ［J］. IEEE Journal of Solid-State Circuits, 2006,41(2):352-361.

[2] [2] AALTONEN L，HALONEN K. Continuous-time interface for a micromachined capacitive accelerometer with NEA of 4 μg and bandwidth of 300 Hz ［J］. Sensors and Actuators A, 2009,154:46-56.

[3] [3] LEE W F, CHAN P K. A capacitive-based accelerometer IC using injection-nulling switch technique ［J］. IEEE Transactions on Circuits and Systems I, 2008,55(4):980-989.

[4] [4] TAN X Y, ZHOU X ZH, XU N, et al.. Error analysis on numerical double integration in acceleration measurement with clock jitter ［J］. Opt. Precision Eng., 2009,17(7):1630-1634.

[5] [5] YIN L, CHEN W P, LIU X W,et al.. CMOS interface circuit for closed-loop accelerometer ［J］. Opt. Precision Eng., 2009,17(6):1311-1315.

[6] [6] AMINI B V, AYAZI F. A 2.5V 14-bit sigma-delta CMOS-SOI capacitive accelerometer ［J］. IEEE Journal of Solid State Circuits, 2004,39(12):2467-2476.

[7] [7] LIU Y T, YIN L, CHEN W P, et al. Design of interface circuit of closed-loop accelerometer with self-test function ［J］. Opt. Precision Eng., 2009,17(6):1379-1385.

[8] [8] BANU M, KHOURY J M , TSIVIDIS Y. Fully differential operational amplifiers with accurate output balancing ［J］. IEEE Journal of Solid-State Circuits, 1988,23(6):1410-1414.

[10] [10] KLAH H, YAZDI N, NAJAFI K. A CMOS switched-capacitor interface circuit for an integrated accelerometer ［C］. Proceedings of 43rd IEEE Midwest Symposium on Circuits and Systems, Lansing, 2000:244-247.

[11] [11] BASCHIROTTO A, GOLA A, CHIESA E, et al.. A ±1 g dual axis linear accelerometer in a standard 0.5 μm CMOS technology for high-sensitivity applications ［J］. IEEE Journal of Solid-State Circuits, 2003, 38(7):1292-1297.

[12] [12] WU J, FEEDER G K, CARLEY L R. A low-noise low-offset capacitive sensing amplifier for a 50 μg/Hz monolithic CMOS MEMS accelerometer ［J］. IEEE Journal of Solid-State Circuits, 2004,39(5):722-730.

[13] [13] PETKOV V P, BOSER B E. A fourth-order interface for micromachined inertial sensors ［J］. IEEE Journal of Solid-State Circuits, 2005,40(8):1602-1609.

[14] [14] LEE W F,CHAN P K. A capacitive-based accelerometer IC using Injection-Nulling Switch Technique ［J］. IEEE Transactions on circuits and systems I. 2008,55(4):980-989.