Optics and Precision Engineering, Volume. 19, Issue 3, 580(2011)
Full differential CMOS interface circuit for closed-loop capacitive micro-accelerometers
A CMOS full differential interface circuit with low noise and high linearity was presented for closed-loop capacitive micro-accelerometers. Based on switched-capacitor detection, the circuit was designed to improve its linearity by a 0.5 μm n-well CMOS process technology. The simulation result shows that the proposed two-path feedback structure provides a good system linearity of 0.01%. The optimized designed PID controller was added into the system,which decreases the stabilization error effectively, increases the system responding speed by 31%, and the linearity by 66.7%. With a ±5 V supply and a sampling frequency of 64 kHz, the circuit can offer the equivalent input noise in 8 μg·Hz-12, system sensitivity in 1.22 V/g, system linearity in 0.03%, and the work range in ±2 g. These results prove that this circuit is suitable for applications of high performance micro-accelerometers to seism detection, oil exploration,etc.
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LIU Xiao-wei, YIN Liang, LI Hai-tao, ZHOU Zhi-ping. Full differential CMOS interface circuit for closed-loop capacitive micro-accelerometers[J]. Optics and Precision Engineering, 2011, 19(3): 580
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Received: Jun. 4, 2010
Accepted: --
Published Online: Mar. 30, 2011
The Author Email: Xiao-wei LIU (lxw@hit.edu.cn)
CSTR:32186.14.