Acta Optica Sinica, Volume. 34, Issue s1, 112011(2014)
Key Techniques in Large-Aperture Phase-Shifting Interferometer Via PZT
[1] [1] Zygo Corporation. Large Aperture Systems[OL]. www.zygo.com/ /met/interferometers/large_aperture/.[2014-7-10].
[2] [2] Chiayu Ai, Robert Knowiden, Joseph Lamb. Design of 24″ phase-shifting Fizeau interferometer[C]. SPIE, 1997, 3134: 447-455.
[3] [3] Zhuang Yan. Detection and Analysis Method of Transfer Function of 600 mm Interferometer System[D]. Nanjing: Nanjing University of Science and Technology, 2011.
[4] [4] Liqun Chai,Qiao Xu, Yingjie Yu, et al.. 500-mm-aperture wavelength-tuning phase-shifting interferometer[C]. SPIE, 2005, 5856: 589-598.
[5] [5] D Malacara. Optical Shop Testing[M]. 2nd edition., New York: John Wiley & Sons Inc., 1992. 151-152.
[6] [6] Liu Jingfeng, Li Yanqiu, Liu Ke. The phase-shifting point diffraction interferometer several key technology instrument[J]. Chinese J Scientific Instrument, 2007, 28(4): 179-182.
[8] [8] Su Datu. Optical Measurement Technology[M]. 1st edition, Beijing: Beijing Institute of Technology Press, 1996. 188-192.
[9] [9] J E Greiveenkamp, J Hbruning. Optical Shop Testing[M]. 1992. 501- 595.
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Wu Xuhua, Chen Lei. Key Techniques in Large-Aperture Phase-Shifting Interferometer Via PZT[J]. Acta Optica Sinica, 2014, 34(s1): 112011
Category: Instrumentation, Measurement and Metrology
Received: Dec. 1, 2013
Accepted: --
Published Online: Aug. 12, 2014
The Author Email: Xuhua Wu (wuxh1978@aliyun.com)