Acta Optica Sinica, Volume. 34, Issue s1, 112011(2014)
Key Techniques in Large-Aperture Phase-Shifting Interferometer Via PZT
The key techniques of large-aperture phase-shifting interferometer via PZT are discussed, includings supporting scheme for large-aperture reference mirror, absolute test of large-aperture flat, on-line calibration of piezoelectric (PZT), test of dynamic phase and large-aperture collimated beam wavefront. Theoretical simulation and experimental measurement are done for developing larger-aperture phase-shifting interferometers.
Get Citation
Copy Citation Text
Wu Xuhua, Chen Lei. Key Techniques in Large-Aperture Phase-Shifting Interferometer Via PZT[J]. Acta Optica Sinica, 2014, 34(s1): 112011
Category: Instrumentation, Measurement and Metrology
Received: Dec. 1, 2013
Accepted: --
Published Online: Aug. 12, 2014
The Author Email: Xuhua Wu (wuxh1978@aliyun.com)