Acta Optica Sinica, Volume. 34, Issue s1, 112011(2014)

Key Techniques in Large-Aperture Phase-Shifting Interferometer Via PZT

Wu Xuhua1、* and Chen Lei2
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
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    The key techniques of large-aperture phase-shifting interferometer via PZT are discussed, includings supporting scheme for large-aperture reference mirror, absolute test of large-aperture flat, on-line calibration of piezoelectric (PZT), test of dynamic phase and large-aperture collimated beam wavefront. Theoretical simulation and experimental measurement are done for developing larger-aperture phase-shifting interferometers.

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    Wu Xuhua, Chen Lei. Key Techniques in Large-Aperture Phase-Shifting Interferometer Via PZT[J]. Acta Optica Sinica, 2014, 34(s1): 112011

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Dec. 1, 2013

    Accepted: --

    Published Online: Aug. 12, 2014

    The Author Email: Xuhua Wu (wuxh1978@aliyun.com)

    DOI:10.3788/aos201434.s112011

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