[1] [1] HE Y F. High-precision biaxial angle measuring instrument research and design ［D］. Maanshan: Anhui University of Technology, 2016. (in Chinese)

[2] [2] TAO W, PU ZH B, SUN Y B. Development of angle measurement technology ［J］ .Journal of Laser, 2002 (2): 5-7. (in Chinese)

[3] [3] ZHOU H F, GONG A L. Optical methods of small angle measurement ［J］ .Journal of Yunnan University for Nationalities: Natural Science, 2006, 15 (2): 130-133. (in Chinese)

[4] [4] LI J Y, WU J T, HAN H Q. Optical method and application of small angle measurement ［J］. Applied Science and Technology, 2006, 33 (7): 15-18. (in Chinese)

[5] [5] WANG M, GAO ZH H. Error analysis of structural parameters of circular grating ［J］. Machinery Manufacturing and Automation, 2017,46 (2): 9-12, 40. (in Chinese)

[6] [6] GENG X. Based on the Principle of Internal Reflection Measurement of Small-angle Changes in the Technical Research ［D］. Nanjing: Nanjing University of Science and Technology, 2015. (in Chinese)

[7] [7] SHAO J Q, JIANG M, XU Y, et al.. Discussion on the method of calibrating the rotation angle measuring device by using optical indexing head ［J］.Industrial Measurement, 2016 (S1): 72. (in Chinese)

[8] [8] WANG G P, CHEN G L, CHEN Y L. Laser interferometry digital angle measurement method and its application ［J］. Opt. Precision Eng., 2001, 9 (1): 85-88. (in Chinese)

[9] [9] TIAN L D, ZHAO J K, WANG T, et al.. Influence of attitude and attitude mismatch of test equipment on circle indexing errors measured by self-collimator ［J］. Opt. Precision Eng., 2017,25(9): 2267-2276. (in Chinese)

[10] [10] SUZUKI T, GREIVENKAMP J E, SASAKI O . Wide-range two-dimensional small rotation-angle measurement by use of fringe projection［J］. SPIE, 2005, 5633: 580662.

[11] [11] SUZUKI T, ENDO T, SASAKI O, et al.. Two-dimensional small-rotation-angle measurement using an imaging method［J］. Optical Engineering, 2015, 45(4): 7-13.

[12] [12] SASAKI, OSAMI. Two-dimensional rotation angle measurement using a sinusoidal phase-modulating laser diode interferometer［J］. Optical Engineering, 2003, 42(4): 1132-1136.

[13] [13] CHEN SH L, LI H R. Laser collimator and its application in industry ［J］ .Journal of Nanchang University: Engineering and Technology, 1980(2): 25-32. (in Chinese)