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Acta Optica Sinica, Volume. 35, Issue 8, 813001(2015)

Silicon Photonic Crystal Nanobeam Cavities Fabricated by Deep-Etching Method

Yu Ping1、*, Qiu Huiye2, Wu Feiqing1, Wang Zhuoyuan1, Yu Mingyan1, and Yu Enjun1
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    Yu Ping, Qiu Huiye, Wu Feiqing, Wang Zhuoyuan, Yu Mingyan, Yu Enjun. Silicon Photonic Crystal Nanobeam Cavities Fabricated by Deep-Etching Method[J]. Acta Optica Sinica, 2015, 35(8): 813001

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    Paper Information

    Category: Integrated Optics

    Received: Jan. 27, 2015

    Accepted: --

    Published Online: Aug. 10, 2015

    The Author Email: Ping Yu (yuping@nit.zju.edu.cn)

    DOI:10.3788/aos201535.0813001

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology