[1] [1] G. Yang, Modern Optical Measuring and Testing Technology (in Chinese) (Zhejiang University Publishing Company, Hangzhou, 1997).

[2] [2] H. J. Tiziani, Proc. SPIE 2248, 2 (1994).

[3] [3] B. V. Dorrio and J. L. Fernandez, Meas. Sci. Technol. 10, R33 (1999).

[4] [4] S. Yoshida, Metrologia 28, 433 (1992).

[5] [5] A. Zeng, X. Wang, Y. Bu, and D. Li, Chin. Opt. Lett. 2, 520 (2004).

[6] [6] A. Zeng, X. Wang, D. Xu, D. Li, L. Huang, Z. Dong, Y. Zhao, X. Jiang, and Y. Bu, Chin. J. Lasers (in Chinese) 32, 1178 (2005).

[7] [7] X. Liu and Y. Gu, Proc. SPIE 3897, 214 (1999).

[8] [8] A. Zeng, X. Wang, D. Li, Z. Dong, L. Huang, and Y. Zhao, Proc. SPIE 5634, 719 (2005).

[9] [9] A. Zeng and X. Wang, Chin. J. Lasers (in Chinese) 32, 394 (2005).

[10] [10] A. Zeng, X. Wang, D. Li, and Y. Bu, Chin. Opt. Lett. 3, 407 (2005).

[11] [11] X. Wang, X. Wang, H. Lu, F. Qian, and Y. Bu, Opt. Laser Technol. 33, 219 (2001).

[12] [12] X. F. Zhang, B. G. Wang, and C. Z. Jiang, Optical Technique (in Chinese) 27, 362 (2001).

[13] [13] Y. H. Fan and Y. Moalem, in Proceedings of IEEE/SEMI Advanced Semiconductor Manufacturing Conference 266 (1998).

[14] [14] S. Hu, H. M. Yao, J. Zhang, Z. Li, X. Y. Zeng, and W. J. Su, Opto-Electronic Engineering (in Chinese) 25(Suppl.), 42 (1998).