Fig. 1. Nano-length traceability system

Fig. 2. (a) Schematic of chromium atom lithography^[5]; (b) Two-dimensional structure of chromium atom lithography grating

Fig. 3. Schematic of sodium atom grating fabrication equipment^[7]

Fig. 4. The first Chromium atom deposition grating fabricated abroad^[8]

Fig. 5. (a) The first quantum grating fabricated in China^[23]; (b) Quantum grating obtained after experimental optimization^[24]; (c) Two-dimensional quantum grating^[25]

Fig. 6. Schematic diagram of measurement and calibration of atomic lithography grating in x direction

Fig. 7. Measurement principle of grating interferometer

Fig. 8. Grating pitch calibration system based on atom lithography gratings

Fig. 9. Original interference signal of the grating pitch calibration system

Fig. 10. (a) Repetitive calibration scheme; (b) Linearity calibration scheme