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Journal of the Chinese Ceramic Society, Volume. 53, Issue 1, 1(2025)

Effect of Oxygen Flow Rate on Atomic Oxygen Resistance Performance of Siloxane Coatings Deposited by Plasma-Enhanced Chemical Vapor Deposition

WANG Hu... WANG Lanxi, ZHOU Hui, LI Xuelei, YANG Miao, LI Kun, NI Zhuang, LI Zhonghua, WANG Zhimin, ZUO Huaping and HE Yanchun |Show fewer author(s)
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  • Science and Technology on Vacuum Technology and Physics Laboratory, Lanzhou Institute of Physics, Lanzhou 730000, China
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    WANG Hu, WANG Lanxi, ZHOU Hui, LI Xuelei, YANG Miao, LI Kun, NI Zhuang, LI Zhonghua, WANG Zhimin, ZUO Huaping, HE Yanchun. Effect of Oxygen Flow Rate on Atomic Oxygen Resistance Performance of Siloxane Coatings Deposited by Plasma-Enhanced Chemical Vapor Deposition[J]. Journal of the Chinese Ceramic Society, 2025, 53(1): 1

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    Received: Mar. 8, 2024

    Accepted: Jan. 10, 2025

    Published Online: Jan. 10, 2025

    The Author Email:

    DOI:10.14062/j.issn.0454-5648.20240195

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology