Fig. 1. schematic cross-sectional view of the UTC photodiode

Fig. 2. The schematic diagram of micro-lens simulation

Fig. 3. 3D heterogeneous integration photoreceiver

Fig. 4. Equivalent model of UTC diode

Fig. 5. UTC-PD Equivalent model frequency characteristic error

Fig. 6. Photoreceiver device schematic.

Fig. 7. Simulated frequency response of the photoreceiver

Fig. 8. Photoreceiver module package diagram

Fig. 9. Picture of the UTC-PD front face（a）and bottom face（b）

Fig. 10. Picture of the photoreceiver

Fig. 11. Experiment frequency response of the photoreceiver