Fig. 1. Electrostatically driven twisted microscope with a vertical comb structure^[2]

Fig. 2. Principle of MEMS-based 1×N OSW

Fig. 3. A MEMS-based TOF with MEMS micro mirror

Fig. 4. A biaxial MEMS micro mirror^[6]

Fig. 5. Optical structure and fiber array structure of MEMS TOF-OSW

Fig. 6. The principle of transmission grating spectrometer

Fig. 7. Structure of biaxial MEMS micro mirror

Fig. 8. Working principle of MEMS micro mirror in X-axis and Y-axis

Fig. 9. Simulation and specific dimensions of MEMS TOF-OSW

Fig. 10. Simulation parameters of MEMS TOF-OSW

Fig. 11. Simulation results of fiber coupling efficiency and output beam position of MEMS TOF-OSW