Laser & Optoelectronics Progress, Volume. 52, Issue 7, 71202(2015)
Study on Defect Detection of Optical Thin Film Using Optical Coherence Tomography
Spectral-domain optical coherence tomography (OCT) is used for the inner defect detection of the optical thin film with high accuracy. It is theoretical analyzed and experimentally validated. The two-dimensional (2-D) cross-sectional images of the optical thin film with single layer and multi-layer structure are obtained respectively. Based on the 2-D cross-sectional images, the defect in the film can be observed clearly, and the position of the defect in film can be located. It is demonstrated that spectral-domain OCT is an effective method for defect detection of the optical film.
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Qin Yuwei. Study on Defect Detection of Optical Thin Film Using Optical Coherence Tomography[J]. Laser & Optoelectronics Progress, 2015, 52(7): 71202
Category: Instrumentation, Measurement and Metrology
Received: Jan. 9, 2015
Accepted: --
Published Online: May. 29, 2015
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