<trans-title xml:lang="en">Composition, Structure and Properties of CrAlN-DLC Hard Composite Films Deposited by Arc Ion Plating</trans-title>

Weijie CHENG; Minglei WANG; Guoqiang LIN

doi:10.15541/jim20210616

Journal of Inorganic Materials, Volume. 37, Issue 7, 764(2022)

Composition, Structure and Properties of CrAlN-DLC Hard Composite Films Deposited by Arc Ion Plating

Weijie CHENG1...2, Minglei WANG1,2, and Guoqiang LIN12,* |Show fewer author(s)

Author Affiliations

¹1. Material Science and Engineering School, Dalian University of Technology, Dalian 116024, China

²2. Key Laboratory for Material Modification by Laser, Ion and Electron Beams, Ministry of Education, Dalian University of Technology, Dalian 116024, China

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Figures & Tables(13)

1. Schematic diagram of enhanced magnetic filtered pulse bias arc ion plating apparatus

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2. SEM surface images of CrAlN-DLC films

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3. SEM surface image and element mappings of CrAlN-DLC 1# film

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4. Compositions of CrAlN-DLC films deposited at different arc current ratios

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5. GI-XRD patterns of CrAlN-DLC films

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6. (a) Raman spectra of CrAlN-DLC films and (b) I_D/I_G, G peak position and g_FWHM changed with C content in the films

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7. (a) C1s, (b) Cr2p, (c) Al2p, and (d) N1s XPS spectra of CrAlN-DLC films, and fitting results of (e) C1s, (f) Cr2p, (g) Al2p, and (h) N1s XPS peaks for (Cr_9.5Al_8.5N_7.4)-C_74.6film

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8. Hardness (H), elastic modulus (E) of CrAlN-DLC films

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9. Friction curves of CrAlN-DLC films

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10. Cross-sectional profiles of wear scars on samples

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Table 1. Deposition parameters of CrAlN-DLC films

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Table 1. Deposition parameters of CrAlN-DLC films

Sample	Arc current/A		Arc current ratio, I_C/I_CrAl	Gas flow/sccm		Pulsed bias			Deposition time/min
Sample	CrAl	C	Arc current ratio, I_C/I_CrAl	N₂	Ar	Frequency/Hz	Amplitude/V	Duty cycle/%	Deposition time/min
CrAlN-DLC 1#	90	30	0.33	10	90	30	-200	40	90
CrAlN-DLC 2#	80	40	0.5	10	90	30	-200	40	90
CrAlN-DLC 3#	70	50	0.71	10	90	30	-200	40	90
CrAlN-DLC 4#	55	65	1.18	10	90	30	-200	40	90
CrAlN-DLC 5#	50	70	1.4	10	90	30	-200	40	90
CrAlN-DLC 6#	40	80	2	10	90	30	-200	40	90

Table 2. Thickness of CrAlN-DLC films with different arc current ratios
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Table 2. Thickness of CrAlN-DLC films with different arc current ratios
Sample I_C/I_CrAl Thickness/μm
CrAlN-DLC 1# 0.33 (0.99±0.03)
CrAlN-DLC 2# 0.50 (1.09±0.02)
CrAlN-DLC 3# 0.71 (1.09±0.02)
CrAlN-DLC 4# 1.18 (1.08±0.01)
CrAlN-DLC 5# 1.40 (1.02±0.02)
CrAlN-DLC 6# 2.00 (1.04±0.02)

Table 3. Fitting results of C1s, Cr2p, Al2p and N1s XPS peak of CrAlN-DLC films (atomic percentage/%)

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Table 3. Fitting results of C1s, Cr2p, Al2p and N1s XPS peak of CrAlN-DLC films (atomic percentage/%)

Area Sample	C1s				Cr2p				Al2p			N1s
	C-Cr	C-C		C-O	Cr-N	Cr-C	Cr-O	Cr-Cr	Al-N	Al-O	Al-Al	Cr	N-Al
	C-Cr	sp²	sp³	C-O	Cr-N	Cr-C	Cr-O	Cr-Cr	Al-N	Al-O	Al-Al	Cr	N-Al
(Cr₂₉Al_25.1N_12.8)-C_33.1	18.9	42.3	33.8	5.0	40.5	32.8	6.2	20.5	64.5	15.5	20.0	79.4	20.6
(Cr_24.7Al_21.9N_13.7)-C_39.7	15.4	43.3	36.0	5.3	42.6	35.5	6.9	16.0	70.9	14.8	14.3	73.9	26.1
(Cr_18.9Al₁₇N₁₅)-C_49.1	12.5	42.6	38.0	6.8	44.2	35.4	6.3	14.1	76.2	13.0	10.8	67.4	32.6
(Cr_15.3Al_14.4N_16.2)-C_53.9	9.8	42.7	40.0	7.5	47.7	34.6	6.1	11.6	78.3	14.2	7.5	62.8	37.2
(Cr_12.4Al_11.1N_6.2)-C_70.3	7.5	41.4	42.3	8.7	40.4	36.0	7.3	18.3	63.8	17.9	18.6	59.2	40.8
(Cr_9.5Al_8.5N_7.4)-C_74.6	4.3	39.0	47.0	10.0	45.0	31.6	7.7	15.7	71.7	17.3	11.0	55.5	44.5

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Weijie CHENG, Minglei WANG, Guoqiang LIN. Composition, Structure and Properties of CrAlN-DLC Hard Composite Films Deposited by Arc Ion Plating[J]. Journal of Inorganic Materials, 2022, 37(7): 764

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