Chinese Optics Letters, Volume. 12, Issue 8, 080501(2014)

Parallel laser writing system with scanning Dammann lithography

Feng Zhu, Jianyong Ma, Wei Huang, Jin Wang, and Changhe Zhou
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Feng Zhu, Jianyong Ma, Wei Huang, Jin Wang, Changhe Zhou. Parallel laser writing system with scanning Dammann lithography[J]. Chinese Optics Letters, 2014, 12(8): 080501

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Received: Feb. 28, 2014

Accepted: Apr. 23, 2014

Published Online: Jul. 31, 2014

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DOI:10.3788/col201412.080501

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