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Journal of Synthetic Crystals, Volume. 49, Issue 8, 1541(2020)

Effect of High Temperature Annealing on Sapphire-based Aluminum Nitride Templates Fabricated by DC Reactive Magnetron Sputtering

LIU Huan1... ZHU Ruzhong1, GONG Jianchao1, WANG Qikun1, FU Danyang1, LEI Dan2, HUANG Jiali2 and WU Liang1,* |Show fewer author(s)
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    LIU Huan, ZHU Ruzhong, GONG Jianchao, WANG Qikun, FU Danyang, LEI Dan, HUANG Jiali, WU Liang. Effect of High Temperature Annealing on Sapphire-based Aluminum Nitride Templates Fabricated by DC Reactive Magnetron Sputtering[J]. Journal of Synthetic Crystals, 2020, 49(8): 1541

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    Paper Information

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    Received: --

    Accepted: --

    Published Online: Nov. 11, 2020

    The Author Email: Liang WU (lwu@shu.edu.cn)

    DOI:

    CSTR:32186.14.

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology