Rotating Chuck Test for Removing Chuck Error of Optical Surface

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[1] Zhang Yanwei, Su Dongqi, Sui Yongxin, Yang Huaijiang. Absolute Testing of Rotationally Asymmetric Surface Deviation with the Method of Rotation-Averaging and Compensation[J]. Chinese Journal of Lasers, 2014, 41(7): 708007

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[8] Tian Wei, Wang Ping, Wang Rudong, Wang Lipeng, Sui Yongxin. Simulation and Experimental Research of 193 nm Projection Lithography Lens Supporting[J]. Chinese Journal of Lasers, 2012, 39(8): 816002

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Wang Ping, Tian Wei, Wang Rudong, Wang Lipeng, Sui Yongxin, Yang Huaijiang. Rotating Chuck Test for Removing Chuck Error of Optical Surface[J]. Acta Optica Sinica, 2011, 31(8): 812004

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Paper Information

Category: Instrumentation, Measurement and Metrology

Received: Feb. 17, 2011

Accepted: --

Published Online: Jul. 19, 2011

The Author Email: Ping Wang (alex.wongp@gmail.com)

DOI:10.3788/aos201131.0812004

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology