Modern Scientific Instruments, Volume. 18, Issue 2, 32(2008)

The Evaluation of Mechanical Properties of Thin Film by Multilayer Microbridge Testing Method

[in Chinese]*, [in Chinese], [in Chinese], [in Chinese], and [in Chinese]
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. The Evaluation of Mechanical Properties of Thin Film by Multilayer Microbridge Testing Method[J]. Modern Scientific Instruments, 2008, 18(2): 32

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    Received: Oct. 17, 2007

    Accepted: --

    Published Online: Aug. 17, 2008

    The Author Email: (周志敏讲师研究方向:薄膜材料及MEMS器件.Email:zmzhou)

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