High Power Laser Science and Engineering, Volume. 3, Issue 4, 04000001(2015)

Space- and time-resolved diagnostics of the ENEA EUV discharge-produced-plasma source used for metrology and other applications

S. Bollanti*, P. Di Lazzaro, F. Flora, L. Mezi, D. Murra, and A. Torre
Author Affiliations
  • ENEA, FSN-Fusion Physics Division-Radiation Sources, Antennas, and Diagnostics Laboratory, Frascati, Italy
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    References(18)

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    [2] Yin Jin, Zhu Jianqiang, Jiao Xiang, Ran Yuting. Method of Steady-State Deterministic Polishing Based on Continuous Polishing[J]. Chinese Journal of Lasers, 2017, 44(11): 1102001

    [3] Bin Shen, Haiyuan Li, Huai Xiong, Xu Zhang, Yongxing Tang. Study on low-refractive-index sol-gel SiO2 antireflective coatings[J]. Collection Of theses on high power laser and plasma physics, 2016, 14(1): 83101

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    S. Bollanti, P. Di Lazzaro, F. Flora, L. Mezi, D. Murra, A. Torre. Space- and time-resolved diagnostics of the ENEA EUV discharge-produced-plasma source used for metrology and other applications[J]. High Power Laser Science and Engineering, 2015, 3(4): 04000001

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    Paper Information

    Special Issue: PLASMA/LASER DIAGNOSTICS

    Received: May. 10, 2015

    Accepted: Sep. 14, 2015

    Published Online: Jan. 7, 2016

    The Author Email: S. Bollanti (sarah.bollanti@enea.it)

    DOI:10.1017/hpl.2015.30

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