Laser & Optoelectronics Progress, Volume. 58, Issue 13, 1306005(2021)
Optical Fiber Integrated Micro/Nano-Structured Device Fabricated by Femtosecond Laser Induced Two-Photon Polymerization and Its Applications
Fig. 1. Processing diagram of femtosecond laser-induced two-photon polymerization process. (a) Optical path diagram of femtosecond laser micromachining system[35]; (b) methods of fixing micro/nano-fibers in the process of two-photon polymerization[35]; (c) polymer Bragg grating diagram[35]; (d) welding process[36]; (e) ablation process[36]; (f) polymerization process[36]; (g) development process[36]
Fig. 2. Various optical integrated waveguide devices fabricated by two-photon polymerization. (a) Linear polymer FBG integrated on microfiber surface [35]; (b) helical FBG integrated on microfiber surface[39]; (c) polymer waveguide FBG integrated in hollow fiber[40]; (d) polymer waveguide interferometer integrated in hollow fiber[41]; (e) all-optical modulator based on a polymer FBG integrated in hollow fiber[36]
Fig. 3. Hydrogen sensor based on fiber end polymer μ-cantilever[42]. (a) Schematic diagram; (b) reflection spectra of μ-cantilever beams at different heights; (c) scanning electron microscopy image of the polymer μ-cantilever
Fig. 4. Fabrication process of the polymer μ-cantilever hydrogen sensor. (a) Modeling; (b) model slicing and scanning path design; (c) polymerization; (d) developing; (e) palladium film coating; (f) finished product
Fig. 5. SZP structure of optical fiber end face prepared by two-photon polymerization method[55]
Fig. 6. Optical path diagram of the optical fiber end face written by the SZP microstructure[57]
Fig. 7. Fiber end face SZP structure[57]
Fig. 8. Kinoform SZP of fiber end face prepared by two-photon polymerization[58]. (a) Structure design; (b) l=-1; (c) l=0; (d) l=1; (e) l=2
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Changrui Liao, Bozhe Li, Mengqiang Zou, Cong Xiong, Meng Zhu, Jian Yu, Chi Li, Yiping Wang. Optical Fiber Integrated Micro/Nano-Structured Device Fabricated by Femtosecond Laser Induced Two-Photon Polymerization and Its Applications[J]. Laser & Optoelectronics Progress, 2021, 58(13): 1306005
Category: Fiber Optics and Optical Communications
Received: May. 24, 2021
Accepted: Jun. 9, 2021
Published Online: Jul. 14, 2021
The Author Email: Wang Yiping (ypwang@szu.edu.cn)