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Spectroscopy and Spectral Analysis, Volume. 39, Issue 8, 2341(2019)

Emission Spectroscopy Diagnosis and Simulation Study of Argon Pressure Effect on Helicon Wave Discharge

DUAN Peng-zhen1,2、*, LI Yi-wen1, ZHANG Bai-ling1, WEI Xiao-long1, CHANG Lei3, and ZHAO Wei-zhuo1
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  • 1[in Chinese]
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  • 3[in Chinese]
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    DUAN Peng-zhen, LI Yi-wen, ZHANG Bai-ling, WEI Xiao-long, CHANG Lei, ZHAO Wei-zhuo. Emission Spectroscopy Diagnosis and Simulation Study of Argon Pressure Effect on Helicon Wave Discharge[J]. Spectroscopy and Spectral Analysis, 2019, 39(8): 2341

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    Paper Information

    Received: Jul. 4, 2018

    Accepted: --

    Published Online: Sep. 2, 2019

    The Author Email: DUAN Peng-zhen (lord_duan@163.com)

    DOI:10.3964/j.issn.1000-0593(2019)08-2341-07

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology