Optics and Precision Engineering, Volume. 29, Issue 10, 2393(2021)

Optical grating encoder via precise electrohydrodynamic direct-writing

Gao-feng ZHENG*... Jia-xin JIANG, Guo-yi KANG, Kai ZHANG and Jian-yi ZHENG |Show fewer author(s)
Author Affiliations
  • Department of Instrumental and Electrical Engineering, Xiamen University, Xiamen361102, China
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    Gao-feng ZHENG, Jia-xin JIANG, Guo-yi KANG, Kai ZHANG, Jian-yi ZHENG. Optical grating encoder via precise electrohydrodynamic direct-writing[J]. Optics and Precision Engineering, 2021, 29(10): 2393

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    Paper Information

    Category: Micro/Nano Technology and Fine Mechanics

    Received: Feb. 26, 2021

    Accepted: --

    Published Online: Nov. 23, 2021

    The Author Email: ZHENG Gao-feng (zheng_gf@xmu.edu.cn)

    DOI:10.37188/OPE.2021.0092

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