Optics and Precision Engineering, Volume. 29, Issue 10, 2393(2021)
Optical grating encoder via precise electrohydrodynamic direct-writing
Precise deposition of micro/nano patterns, and integrated manufacturing of micro functional devices are key to the application of electrohydrodynamic direct-writing (EDW), a phenomenon that highlights the urgent requirement for a stable jet. A fuzzy controller was introduced to build a closed-loop controlling system to overcome the shortcomings of multi-interference parameters, and lack of controlling models in EDW technology. The jet behaviors electrospinning current, and line width of printed micro pattern were investigated. Two optical grating encoders with linear and circular structures were direct-written to measure respective linear and angular velocities. A velocity sensing system was constructed to measure the performance of these two direct-written optical grating encoders. Jet stability and uniformity of printed structures were enhanced by the closed-loop controlling system, which decreased line width range from 40-140 µm to 50-100 µm. The measurement ranges of the direct-written linear optical grating for linear velocity and the ring optical grating for angular velocity were 0-100 mm/s and 0-100 (º)/s, and the measurement errors were less than 0.87% and 0.74%, respectively. A fuzzy closed loop control is a promising method for increasing the stability of EDW technology and integrated manufacturing accuracy of micro devices, which would accelerate the industrial application of micro/nano inkjet technologies.
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Gao-feng ZHENG, Jia-xin JIANG, Guo-yi KANG, Kai ZHANG, Jian-yi ZHENG. Optical grating encoder via precise electrohydrodynamic direct-writing[J]. Optics and Precision Engineering, 2021, 29(10): 2393
Category: Micro/Nano Technology and Fine Mechanics
Received: Feb. 26, 2021
Accepted: --
Published Online: Nov. 23, 2021
The Author Email: ZHENG Gao-feng (zheng_gf@xmu.edu.cn)